Ar plasma irradiation effects in atomically controlled Si epitaxial growth
Daisuke Muto, Masao Sakuraba, Takuya Seino, Junichi MurotaVolume:
224
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2003.08.048
File:
PDF, 151 KB
english, 2004