In situ B doping of SiGe(C) using BCl3 in ultraclean...

In situ B doping of SiGe(C) using BCl3 in ultraclean hot-wall LPCVD

Yasuo Kunii, Yasuhiro Inokuchi, Atsushi Moriya, Harushige Kurokawa, Junichi Murota
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Volume:
224
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2003.08.089
File:
PDF, 207 KB
english, 2004
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