Fabrication of SiGe-on-insulator by rapid thermal annealing...

Applied Surface Science 2004 Vol. 224; Iss. 1-4

Fabrication of SiGe-on-insulator by rapid thermal annealing of Ge on Si-on-insulator substrate

Kentaro Kutsukake, Noritaka Usami, Kozo Fujiwara, Toru Ujihara, Gen Sazaki, Kazuo Nakajima, Baoping Zhang, Yusaburo Segawa
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Volume:
224
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2003.08.100
File:
PDF, 228 KB
english, 2004
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