Mobility and performance enhancement in compressively...

Applied Surface Science 2004 Vol. 224; Iss. 1-4

Mobility and performance enhancement in compressively strained SiGe channel PMOSFETs

Zhonghai Shi, David Onsongo, Sanjay K. Banerjee
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Volume:
224
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2003.08.110
File:
PDF, 204 KB
english, 2004
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