Deep reactive ion etching of PMMA

Applied Surface Science 2004 Vol. 227; Iss. 1-4

Deep reactive ion etching of PMMA

Congchun Zhang, Chunsheng Yang, Duifu Ding
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Volume:
227
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2003.11.050
File:
PDF, 205 KB
english, 2004
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