Low-cost photomask fabrication using laser ablation

Journal of Materials Processing Technology 2015 / 02 Vol. 216

Low-cost photomask fabrication using laser ablation

Legeay, G., Castel, X., Benzerga, R., Moussavou, A.-G., Sauleau, R., Guilloux-Viry, M.
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Volume:
216
Language:
english
Journal:
Journal of Materials Processing Technology
DOI:
10.1016/j.jmatprotec.2014.08.024
Date:
February, 2015
File:
PDF, 3.12 MB
english, 2015
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