Layer-by-layer deposition of epitaxial TiN–CrN multilayers on MgO(0 0 1) by pulsed laser ablation
Kei Inumaru, Takayoshi Ohara, Kazuma Tanaka, Shoji YamanakaVolume:
235
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2004.03.260
File:
PDF, 129 KB
english, 2004