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Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing
E López, S Chiussi, J Serra, P González, C Serra, U Kosch, B León, F Fabbri, L Fornarini, S MartelliVolume:
234
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2004.05.053
File:
PDF, 310 KB
english, 2004