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3D imprint technology using substrate voltage change
Jun Taniguchi, Masamichi Iida, Takayuki Miyazawa, Iwao Miyamoto, Kiyoshi ShinodaVolume:
238
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2004.05.220
File:
PDF, 402 KB
english, 2004