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Plasma-assisted SiC oxidation for power device fabrication
P. Mandracci, S. Ferrero, S. Porro, C. Ricciardi, G. Richieri, L. ScaltritoVolume:
238
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2004.05.224
File:
PDF, 114 KB
english, 2004