Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
Minami, Tadatsugu, Sato, Hirotoshi, Nanto, Hidehito, Takata, ShinzoVolume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.24.l781
Date:
October, 1985
File:
PDF, 684 KB
1985