Surface damage induced by focused-ion-beam milling in a...

Applied Surface Science 2005 Vol. 241; Iss. 1-2

Surface damage induced by focused-ion-beam milling in a Si/Si p–n junction cross-sectional specimen

Zhouguang Wang, Takeharu Kato, Tsukasa Hirayama, Naoko Kato, Katsuhiro Sasaki, Hiroyasu Saka
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Volume:
241
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2004.09.092
File:
PDF, 314 KB
english, 2005
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