Sb excimer-laser doping in ZnO films prepared by oxidation of sulfide on Si
K. Ohara, T. Seino, A. Nakamura, T. Aoki, H. Kominami, Y. Nakanishi, Y. HatanakaVolume:
244
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2004.10.092
File:
PDF, 202 KB
english, 2005