Excimer laser modification of thin AlN films

Applied Surface Science 2005 Vol. 249; Iss. 1-4

Excimer laser modification of thin AlN films

D.G. Georgiev, L.W. Rosenberger, Y.V. Danylyuk, R.J. Baird, G. Newaz, G. Shreve, G. Auner
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Volume:
249
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.apsusc.2004.11.027
File:
PDF, 520 KB
english, 2005
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