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Pulsed laser deposition of HfO2 and PrxOy high-k films on Si(100)
M. Ratzke, D. Wolfframm, M. Kappa, S. Kouteva-Arguirova, J. ReifVolume:
247
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2005.01.094
File:
PDF, 311 KB
english, 2005