Ion beam etching of high resolution structures in Ta2O5 for...

Applied Surface Science 2005 Vol. 252; Iss. 4

Ion beam etching of high resolution structures in Ta2O5 for grating-assisted directional coupler applications

Andreas Perentos, Arnan Mitchell, Anthony Holland
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Volume:
252
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2005.01.153
File:
PDF, 380 KB
english, 2005
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