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Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications
Ya Cheng, Koji Sugioka, Katsumi MidorikawaVolume:
248
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2005.03.078
File:
PDF, 205 KB
english, 2005