Laser patterning of SiOx-layers for the fabrication of UV diffractive phase elements
Malte Schulz-Ruhtenberg, Jürgen Ihlemann, Jörg HeberVolume:
248
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2005.03.096
File:
PDF, 235 KB
english, 2005