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Self-organized amorphous material in silicon (0 0 1) by focused ion beam (FIB) system
Y. Huang, D.J.H. Cockayne, C. Marsh, J.M. Titchmarsh, A.K. Petford-LongVolume:
252
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2005.03.175
File:
PDF, 227 KB
english, 2005