Study by AES of the titanium nitruration in the growing of TiN thin films by PLD technique
C. Gonzalez-Valenzuela, L. Cota, R. Gonzalez-Valenzuela, W. de la Cruz, A. Duarte-MöllerVolume:
252
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2005.05.058
File:
PDF, 191 KB
english, 2006