157 nm: Deepest deep-ultraviolet yet

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1999 Vol. 17; Iss. 6

157 nm: Deepest deep-ultraviolet yet

Rothschild, M., Bloomstein, T. M., Curtin, J. E., Downs, D. K., Fedynyshyn, T. H., Hardy, D. E., Kunz, R. R., Liberman, V., Sedlacek, J. H. C., Uttaro, R. S., Bates, A. K., Van Peski, C.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591137
File:
PDF, 580 KB
english, 1999
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