Superhard Nb–Si–N composite films synthesized by reactive...

Applied Surface Science 2006 Vol. 252; Iss. 14

Superhard Nb–Si–N composite films synthesized by reactive magnetron sputtering

Yunshan Dong, Yan Liu, Jiawei Dai, Geyang Li
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Volume:
252
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2005.08.007
File:
PDF, 226 KB
english, 2006
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