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Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
Gwangpyo Choi, L. Satyanarayana, Jinseong ParkVolume:
252
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2005.09.069
File:
PDF, 467 KB
english, 2006