A novel CMOS out-of-plane accelerometer with fully differential gap-closing capacitance sensing electrodes
Wang, Chuanwei, Tsai, Ming-Han, Sun, Chih-Ming, Fang, WeileunVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/009
Date:
July, 2007
File:
PDF, 567 KB
english, 2007