Dry etching of MgCaO gate dielectric and passivation layers...

Dry etching of MgCaO gate dielectric and passivation layers on GaN

M. Hlad, L. Voss, B.P. Gila, C.R. Abernathy, S.J. Pearton, F. Ren
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Volume:
252
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2005.10.018
File:
PDF, 355 KB
english, 2006
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