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Dry etching of MgCaO gate dielectric and passivation layers on GaN
M. Hlad, L. Voss, B.P. Gila, C.R. Abernathy, S.J. Pearton, F. RenVolume:
252
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2005.10.018
File:
PDF, 355 KB
english, 2006