Characterization of ion species of silicon oxide films...

Characterization of ion species of silicon oxide films using positive and negative secondary ion mass spectra

Kiyoshi Chiba, Shun Nakamura
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Volume:
253
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2005.12.118
File:
PDF, 298 KB
english, 2006
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