Determination of organic contaminations on Si wafer surfaces by static ToF-SIMS: Improvement of the detection limit with C60+ primary ions
Claude Poleunis, Arnaud Delcorte, Patrick BertrandVolume:
252
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2006.02.267
File:
PDF, 331 KB
english, 2006