Bulk periodic structures formation on monocrystalline silicon surface under the action of compression plasma flows
V.M. Astashynski, S.I. Ananin, A.S. Emelyanenko, E.A. Kostyukevich, A.M. Kuzmitzky, S.P. Zhvavy, V.V. UglovVolume:
253
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2006.03.023
File:
PDF, 716 KB
english, 2006