Fabrication of nanostructures on Si(1 0 0) and GaAs(1 0 0) by local anodic oxidation
Jiří Červenka, Radek Kalousek, Miroslav Bartošík, David Škoda, Ondřej Tomanec, Tomáš ŠikolaVolume:
253
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2006.03.095
File:
PDF, 647 KB
english, 2006