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Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique bombardment
B. Fares, B. Gautier, Ph. Holliger, N. Baboux, G. Prudon, J.-Cl. DupuyVolume:
253
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.apsusc.2006.05.034
File:
PDF, 679 KB
english, 2006