Crystallite misorientation analysis in semiconductor wafers and ELO samples by rocking curve imaging
P. Mikulík, D. Lübbert, P. Pernot, L. Helfen, T. BaumbachVolume:
253
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2006.05.084
File:
PDF, 1.02 MB
english, 2006