Investigation of thermal annealing effects on...

Applied Surface Science 2006 Vol. 253; Iss. 1

Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films

M. Modreanu, J. Sancho-Parramon, O. Durand, B. Servet, M. Stchakovsky, C. Eypert, C. Naudin, A. Knowles, F. Bridou, M.-F. Ravet
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Volume:
253
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2006.06.005
File:
PDF, 744 KB
english, 2006
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