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In situ ellipsometry of surface layer of non-metallic transparent materials during its finish processing
Oleksandr Y. Filatov, Leonid V. PoperenkoVolume:
253
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2006.06.012
File:
PDF, 497 KB
english, 2006