An XPS study on ion beam induced oxidation of titanium...

Applied Surface Science 2006 Vol. 253; Iss. 1

An XPS study on ion beam induced oxidation of titanium silicide

P. Osiceanu
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Volume:
253
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2006.06.018
File:
PDF, 205 KB
english, 2006
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