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Silicidation in Ni/Si thin film system investigated by X-ray diffraction and Auger electron spectroscopy
S. Abhaya, G. Amarendra, S. Kalavathi, Padma Gopalan, M. Kamruddin, A.K. Tyagi, V.S. Sastry, C.S. SundarVolume:
253
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2006.07.091
File:
PDF, 349 KB
english, 2007