The effect of applied negative bias voltage on the...

Applied Surface Science 2007 Vol. 253; Iss. 7

The effect of applied negative bias voltage on the structure of Ti-doped a-C:H films deposited by FCVA

Peng Wang, Xia Wang, Youming Chen, Guangan Zhang, Weimin Liu, Junyan Zhang
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Volume:
253
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2006.08.003
File:
PDF, 689 KB
english, 2007
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