A calibrated atomic force microscope using an orthogonal...

A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer

Dong-Yeon Lee, Dong-Min Kim, Dae-Gab Gweon, Jinwon Park
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Volume:
253
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2006.08.027
File:
PDF, 798 KB
english, 2007
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