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Research on the properties of ZnO thin films deposited by using filtered cathodic arc plasma technique on glass substrate under different flow rate of O2
C. Li, X.C. Li, P.X. Yan, E.M. Chong, Y. Liu, G.H. Yue, X.Y. FanVolume:
253
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2006.08.048
File:
PDF, 579 KB
english, 2007