Atomic layer deposition of PbZrO3 thin films

Applied Surface Science 2007 Vol. 253; Iss. 12

Atomic layer deposition of PbZrO3 thin films

Jenni Harjuoja, Samuli Väyrynen, Matti Putkonen, Lauri Niinistö, Eero Rauhala
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Volume:
253
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2006.11.041
File:
PDF, 302 KB
english, 2007
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