Microstructure and electrical characterization based on AFM of very high-doped polysilicon grains
R. Coq Germanicus, E. Picard, B. Domenges, K. Danilo, R. RogelVolume:
253
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2006.12.114
File:
PDF, 945 KB
english, 2007