Mechanical properties of Mo–Ru thin films with Ni...

Applied Surface Science 2007 Vol. 253; Iss. 14

Mechanical properties of Mo–Ru thin films with Ni interlayer of different thickness

Chi-Yun Kang, Yung-I Chen, Chih-Hsiung Lin, Jenq-Gong Duh
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Volume:
253
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2007.01.074
File:
PDF, 579 KB
english, 2007
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