![](/img/cover-not-exists.png)
Nano- and micro-scale patterning of Si (1 0 0) under keV ion irradiation
Yashpal S. Katharria, Sandeep Kumar, A. Tarun Sharma, Dinakar KanjilalVolume:
253
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2007.01.130
File:
PDF, 629 KB
english, 2007