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Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
Z.Lj. Petrović, Z.M. Raspopović, V.D. Stojanović, J.V. Jovanović, G. Malović, T. Makabe, J. de UrquijoVolume:
253
Year:
2007
Language:
english
Pages:
22
DOI:
10.1016/j.apsusc.2007.02.005
File:
PDF, 2.22 MB
english, 2007