Data and modeling of negative ion transport in gases of...

Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies

Z.Lj. Petrović, Z.M. Raspopović, V.D. Stojanović, J.V. Jovanović, G. Malović, T. Makabe, J. de Urquijo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
253
Year:
2007
Language:
english
Pages:
22
DOI:
10.1016/j.apsusc.2007.02.005
File:
PDF, 2.22 MB
english, 2007
Conversion to is in progress
Conversion to is failed