Nanohole processing on silicon substrate by femtosecond laser pulse with localized surface plasmon polariton
Petar A. Atanasov, Hiroto Takada, Nikolay N. Nedyalkov, Minoru ObaraVolume:
253
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2007.02.108
File:
PDF, 536 KB
english, 2007