Preparation and characterization of titanium oxy-nitride thin films
M. Braic, M. Balaceanu, A. Vladescu, A. Kiss, V. Braic, G. Epurescu, G. Dinescu, A. Moldovan, R. Birjega, M. DinescuVolume:
253
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2007.02.179
File:
PDF, 1.29 MB
english, 2007