Sequential Monitoring of Film Thickness Variations with...

Sequential Monitoring of Film Thickness Variations with Surface Plasmon Resonance Imaging and Imaging Ellipsometry Constructed with a Single Optical System

Li, Yong-Jun, Zhang, Yi, Zhou, Feimeng
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Volume:
80
Language:
english
Journal:
Analytical Chemistry
DOI:
10.1021/ac701873v
Date:
February, 2008
File:
PDF, 372 KB
english, 2008
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