Synthesis of TiN thin films by a new combined laser/sol–gel processing technique
Tamer Ezz, Philip Crouse, Lin Li, Zhu LiuVolume:
253
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2007.02.189
File:
PDF, 638 KB
english, 2007