Optical and mechanical properties of alumina films...

Applied Surface Science 2007 Vol. 253; Iss. 24

Optical and mechanical properties of alumina films fabricated on Kapton polymer by plasma immersion ion implantation and deposition using different biases

Yongxian Huang, Xiubo Tian, Shiqin Yang, Ricky K.Y. Fu, Paul K. Chu
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Volume:
253
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2007.06.011
File:
PDF, 956 KB
english, 2007
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