Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen
J. Müllerová, P. Šutta, G. van Elzakker, M. Zeman, M. MikulaVolume:
254
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2007.10.069
File:
PDF, 574 KB
english, 2008