Gas barrier properties of titanium oxynitride films...

Applied Surface Science 2008 Vol. 254; Iss. 11

Gas barrier properties of titanium oxynitride films deposited on polyethylene terephthalate substrates by reactive magnetron sputtering

M.-C. Lin, L.-S. Chang, H.C. Lin
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Volume:
254
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.apsusc.2007.11.064
File:
PDF, 1.39 MB
english, 2008
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